AlN Template

AlN on Silicon Template

AlN on silicon templates provide a high-quality interface and buffer platform for subsequent GaN epitaxy, supporting the development of high-performance GaN power and RF devices.

Substrate — Silicon (100) or (111)
Size — 4", 6”, 8", customizable
Epi Thickness — 50nm~1μm
Surface finished — epi-ready
XRD FWHM (0002) — typical ≤1050 arcsec
Custom specification — acceptable
Package — Single wafer cassette, vacuum sealed

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Detailed Specifications

Published specifications by wafer diameter.

Select a diameter to review the corresponding published specification set.

Parameter	AlN on Silicon Template
Substrate	Silicon
Substrate Orientation	(111) / (100)
Size	4", 6", 8" and customized
AlN Film Thickness	50nm–1μm, customizable
XRD FWHM (0002)	≤1050 arcsec*
Surface Roughness	Ra <2nm*
Surface	Epi-ready
Primary Function	AlN buffer / template for GaN-on-Si epitaxy

* Typical specifications; actual values may vary according to wafer size, substrate and growth conditions.

Applications

Where this wafer delivers value

GaN Power Electronics

AlN-on-silicon templates can be used as a buffer platform for GaN-on-Si power devices, including GaN HEMTs and high-efficiency switching devices.

GaN RF Devices

AlN-on-silicon templates can also support selected GaN RF and high-frequency device structures, depending on the overall epitaxial design. Typical applications include:

GaN HEMT Epitaxy

The templates provide a controlled AlN interface for subsequent GaN / AlGaN epitaxial growth, making them suitable for research and development of GaN HEMT structures.

FAQ

Common questions about this product

Quick answers on material selection, customization, testing and ordering.

What AlN thickness is available?

Typical AlN thickness ranges from 50nm to 1μm, and can be customized according to the GaN epitaxial architecture.

Can you provide samples for R&D?

Yes. Small quantities and customized specifications can be discussed for research and prototype projects.

What information is needed for a quotation?

Please provide the wafer diameter, silicon orientation, AlN thickness, quantity and target application. We can then recommend a suitable specification and quotation.

Technical Inquiry

Speak to Engineers About Your Wafer Needs

Share your material, dimensions, specifications, application or project stage. Our team will review your requirements and respond within one business day.